Armenian Journal of Physics

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Sukharev, V. and Markosian, A. and Khachartyan, N. and Manukyan, L. and Choy, J.H. (2008) DESIGN-SPECIFIC VARIATIONS IN VIA-CONTACT ETCH - FULL CHIP ANALYSIS. Armenian Journal of Physics, 1 (1). pp. 65-69. ISSN 1829-1171

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