Armenian Journal of Physics

Conductometric sensor for hydrogen peroxide vapors detection

Shahkhatuni, G.H. and Aroutiounian, V.M. and Arakelyan, V.M and Aleksanyan, M.S. and Shahnazaryan, G.E. (2018) Conductometric sensor for hydrogen peroxide vapors detection. Armenian Journal of Physics, 11 (3). pp. 153-159. ISSN 1829-1171

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Abstract

ZnO doped with 2 at.% La gas sensitive thin film was deposited on the Multi-Sensor-Platforms by the rf magnetron sputtering method using ZnO doped with 2 at.% La ceramic target prepared by us. Palladium catalytic particles were deposited by ion beam sputtering method on the surface of the sensing layer. The sensitivity of semiconductor film to low concentration of hydrogen peroxide vapors was measured at different operating temperatures. It was found that the ZnO+2 at.% La film has shown high sensitivity to low concentration of hydrogen peroxide vapors at different operating temperature started from room temperature.

Item Type:Article
Subjects:Physics > 07.Instruments, apparatus, components common to several branches of physics
Physics > 50.Physics of gases, plasmas, and electric discharges
ID Code:978
Deposited By:Prof. Vladimir Aroutiounian
Deposited On:21 Oct 2018 03:20
Last Modified:21 Oct 2018 03:20

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