Armenian Journal of Physics

INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO<Al> THIN FILM

Galstyan, V.E. and Aroutiounian, V.M. and Arakelyan, V.M and Shahnazaryan, G.E. (2008) INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO<Al> THIN FILM. Armenian Journal of Physics, 1 (4). pp. 242-246. ISSN 1829-1171

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Abstract

Aluminum-doped ZnO nano-size films were grown on glass ceramic substrates by the high-frequency magnetron sputtering method. Investigations of the surface of films were carried out. Pt layer and gold interdigitated ohmic contacts were evaporated on prepared films by the ion-beam sputtering method. Sensitivity to different concentrations of hydrogen (10005000 ppm) in air was investigated. Measurements were carried in the temperature range 401000C. The glass ceramic/ZnO<Al>/Pt structure shows sufficient sensitivity to hydrogen at the pre-heating of the working body already up to 400С.

Item Type:Article
Subjects:Physics > 73.Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures
ID Code:83
Deposited By:Prof. Vladimir Aroutiounian
Deposited On:30 Jan 2009 00:56
Last Modified:02 Oct 2013 05:53

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