Galstyan, V.E. and Aroutiounian, V.M. and Arakelyan, V.M and Shahnazaryan, G.E. (2009) INVESTIGATION OF HYDROGEN SENSOR MADE OF ZnO<Al> THIN FILM. Armenian Journal of Physics, 1 (4). pp. 242-246. ISSN 1829-1171
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Abstract
Aluminum-doped ZnO nano-size films were grown on glass ceramic substrates by the high-frequency magnetron sputtering method. Investigations of the surface of films were carried out. Pt layer and gold interdigitated ohmic contacts were evaporated on prepared films by the ion-beam sputtering method. Sensitivity to different concentrations of hydrogen (10005000 ppm) in air was investigated. Measurements were carried in the temperature range 401000C. The glass ceramic/ZnO<Al>/Pt structure shows sufficient sensitivity to hydrogen at the pre-heating of the working body already up to 400С.
| Item Type: | Article |
|---|---|
| Subjects: | Physics > 73.Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures |
| ID Code: | 83 |
| Deposited By: | Prof. Vladimir Aroutiounian |
| Deposited On: | 30 Jan 2009 00:56 |
| Last Modified: | 19 Apr 2011 03:40 |
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