Armenian Journal of Physics

On the Method of Monitoring and Optimal Control of RF-Plasma

Aghajanyan, A. and Hakhoumian, A. A. and Poghosyan, N. and Poghosyan, T. and Zakaryan, T. (2015) On the Method of Monitoring and Optimal Control of RF-Plasma. Armenian Journal of Physics, 8 (1). pp. 44-50. ISSN 1829-1171

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Abstract

A new strategy of reaching efficient matched conditions at the maximum speed in RF power delivery systems for plasma processes is proposed and analyzed. Presented method incorporates unique properties of high speed, automatic discrete matching networks, allowing creation of shortest trajectories and bypassing inhibited states of network parameters. The special matching network model is used to test optimal matching path finder method which allows to maximize the delivered power at the minimum time.

Item Type:Article
Subjects:Physics > 07.Instruments, apparatus, components common to several branches of physics
Physics > 50.Physics of gases, plasmas, and electric discharges
Physics > 84.Electronics; radiowave and microwave technology; direct energy conversion and storage
ID Code:733
Deposited By:Prof. Vladimir Aroutiounian
Deposited On:15 Mar 2015 21:17
Last Modified:21 Mar 2015 13:42

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