Armenian Journal of Physics

PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION

Ghulghazaryan, R. and Khachatryan, N. and Sukharev, V. (2008) PHYSICS BASED FULL-CHIP SCALE MODELING OF COPPER ELECTROCHEMICAL DEPOSITION. Armenian Journal of Physics, 1 (2). pp. 169-173. ISSN 1829-1171

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Abstract

Full-chip multi-scale physics based pattern dependent copper electrochemical deposition models are considered.

Item Type:Article
Subjects:Physics > 81.Materials science
ID Code:48
Deposited By:Prof. Vladimir Aroutiounian
Deposited On:27 Aug 2008 14:25
Last Modified:19 Apr 2011 02:40

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