Armenian Journal of Physics

PREPARATION OF ZnO<AL> NANO-SIZE LAYERS BY MAGNETRON SPUTTERING

Galstyan, V.E. (2008) PREPARATION OF ZnO<AL> NANO-SIZE LAYERS BY MAGNETRON SPUTTERING. In: THE SIXTH INTERNATIONAL CONFERENCE “SEMICONDUCTOR MICRO – AND NANOELECTRONICS”, SEPTEMBER 18-20, 2007, TSAKHKADZOR, Armenia.

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Abstract

Nano-dimensional thin layers of ZnO<Al> were fabricated by the magnetron sputtering. SEM images of obtained films were obtained and the dependence of the layer thickness on the sputtering time was investigated.

Item Type:Conference or Workshop Item (Paper)
Subjects:Physics > 73.Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures
ID Code:42
Deposited By:Prof. Vladimir Aroutiounian
Deposited On:27 Aug 2008 14:03
Last Modified:19 Apr 2011 02:40

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